Abstract
Helium Ion Microscopy (HIM) is one of the latest technologies in the imaging toolbox. The HIM utilizes ~ 35 KeV He ions focused on a small spot (a few ångströms in diameter). Significantly smaller beam spot size, reduced multiple scattering and high SE yield gives important advantages over a SEM. The main advantage of HIM for imaging is the much deeper field of view and the unique capability to image non-conducting samples without a deposited metal overlayer. Using HIM we are pursuing collaborative projects in both the biological and biomedical fields. We have imaged “aged” rat kidney glomeruli, the biological structure responsible for the blood filtration. A series of images clearly reveals the structural and morphological changes associated with the aging process. In a second study, we investigate the effect of ocean acidification on coral survivability. We have imaged calcification centers in corals and observed significant morphological changes as absorbed calcium forms. We are developing a time of flight (ToF) energy analysis system which allows elemental identification on the nanometer scale in combination with the quantitative advantages of ion scattering technologies. The facility brings new capabilities for both characterization and metrology for a nano-electronics.